| Year of Publication |
2004
|
| Journal |
Journal of materials processing technology 148 (1), 50-56, 2004
|
| Volume |
148
|
| Number of Pages |
50–56
|
| Download citation |
Publications
Numerical study of photolithography system: electromagnetic differential method
Associate Professor of Physics
Citation: Numerical study of photolithography system: electromagnetic differential method. Journal of materials processing technology 148 (1), 50-56, 2004. 2004;148:50–56.
In: Journal of materials processing technology 148 (1), 50-56, 2004
Published by: Elsevier , 2004
google Scholar link: https://scholar.google.com/citations?view_op=view_citation&hl=en&user=pq1RqksAA…
Cited by: 2