| Year of Publication |
2004
|
| Journal |
Journal of materials processing technology
|
| Volume |
148
|
| Number of Pages |
50–56
|
| Download citation |
Publications
Numerical study of photolithography system: electromagnetic differential method
Associate Professor of Physics
Citation: Numerical study of photolithography system: electromagnetic differential method. Journal of materials processing technology. 2004;148:50–56.
In: Journal of materials processing technology
Published by: Elsevier , 2004
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