Year of Publication
2017
Journal
Science of Advanced Materials
Volume
9
Number of Pages
199–205
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Correlation of structural, morphological, electrical and mechanical properties of TiN thin film at different substrate bias

Professor of Chemistry

Citation: Correlation of structural, morphological, electrical and mechanical properties of TiN thin film at different substrate bias. Science of Advanced Materials. 2017;9:199–205.

In: Science of Advanced Materials

Published by: American Scientific Publishers , 2017

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